Key Takeaways
- Microtronic has introduced the WaferWeight feature for real-time wafer mass monitoring during defect inspections.
- The technology is incorporated into the EAGLEview™ inspection systems, enhancing process efficiency and accuracy.
- WaferWeight allows for precision tracking of wafer mass changes, supporting improved semiconductor manufacturing quality.
Innovative Wafer Monitoring Unveiled
Microtronic, based in Hawthorne, NY, has launched WaferWeight, a new technology designed to measure semiconductor wafer weights concurrently with defect inspections. This advancement is integrated into their EAGLEview™ line of macro defect inspection systems, marking a significant enhancement in semiconductor manufacturing processes.
According to Microtronic CEO Reiner Fenske, the ability to track wafer mass changes during various processing steps is crucial in today’s complex semiconductor environments. Traditional methods of measuring wafer weight have been costly and time-consuming, necessitating separate tools. WaferWeight streamlines this process by enabling simultaneous measurement and inspection within a single system.
The new WaferWeight technology achieves a measurement resolution as low as 0.1mg, allowing for meticulous tracking of mass variations across different wafers and processing stages. This detailed monitoring can identify potential process issues that may not be apparent through visual inspection alone. If wafer weight changes exceed predefined limits, the system can trigger alerts for further inspection or corrective actions.
Fenske noted that the swift throughput of the EAGLEview system is essential for effective wafer mass monitoring. To maintain high-quality manufacturing, fabs must obtain comprehensive data from each wafer in every batch. The integration of WaferWeight into the EAGLEview system positions Microtronic as a leading choice for many top-tier fabs globally.
All collected WaferWeight data can be stored in the ProcessGuard™ software, which creates a robust database of every wafer processed. This software automatically tracks wafers by lot, date, and time, facilitating randomization and positional analysis. The integrated Slot-Positional Analysis Tool can graph and compare various wafer metrics, including weight fluctuations before and after processing.
For further details on WaferWeight, ProcessGuard, and EAGLEview systems, inquiries can be directed to Microtronic or through their website at www.microtronic.com.
Founded in 1994, Microtronic specializes in advanced systems and software for automated macro defect inspection in semiconductor wafer processing. Their EAGLEview system stands out for its unmatched speed and capability to inspect 100% of every wafer in each lot, identifying, categorizing, and storing all defect-related information efficiently.
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